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Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Publication:
Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Date
2015
Proceedings Paper
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30361.pdf
2.77 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pathangi Sriraman, Hari
;
Chan, BT
;
Bayana, Hareen
;
Van Den Heuvel, Dieter
;
Van Look, Lieve
;
Rincon Delgadillo, Paulina
;
Cao, Yi
;
Kim, YiHoon
;
Lin, G.
;
Parnell, Doni
;
Nafus, Kathleen
;
Harukawa, Ryoto
;
Chikashi, Ito
;
Nagaswami, Venkat
;
D'Urzo, Lucia
;
Gronheid, Roel
;
Nealey, Paul
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2001
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
2001
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations