Browsing by imec author "42757f599b93ab6b619c4e27089a55eab87385ee"
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High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators
Feutmba, GIlles F.; Da Silva, Leandro; Singh, Nishant; Breyne, Laurens; De Geest, Kobe; Puthenparampil George, John; Bauwelinck, Johan; Van Thourhout, Dries; Yin, Xin; Beeckman, Jeroen (2023)