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High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators
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Authors
Feutmba, GIlles F.
;
Da Silva, Leandro
;
Singh, Nishant
;
Breyne, Laurens
;
De Geest, Kobe
;
Puthenparampil George, John
;
Bauwelinck, Johan
;
Van Thourhout, Dries
;
Yin, Xin
;
Beeckman, Jeroen
DOI
10.1364/OME.494148
ISSN
2159-3930
Issue
7
Journal
OPTICAL MATERIALS EXPRESS
Volume
13
Title
High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators
Publication type
Journal article
Embargo date
9999-12-31
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Date
Summary
3
20.500.12860/42275.3
*
2023-08-11T07:26:02Z
validation by library/open access desk
2
20.500.12860/42275.2
2023-08-09T10:28:07Z
validation by imec author
1
20.500.12860/42275
2023-08-05T17:01:15Z
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