Browsing by author "Plante, W."

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Analysis of trace metals in silicon nitride films by a vapor phase decomposition - solution collection approach

Vereecke, Guy; Schaekers, Marc; Verstraete, Kurt; Arnauts, Sophia; Heyns, Marc; Plante, W. (1999)
Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approach

Vereecke, Guy; Schaekers, Marc; Verstraete, Kurt; Arnauts, Sophia; Heyns, Marc; Plante, W. (2000)