Browsing by author "Song, Seung Keun"
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Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
Nye, Rachel; Song, Seung Keun; Van Dongen, Kaat; Delabie, Annelies; Parsons, Gregory N. (2022)