Browsing by author "Bennett, Nick"
Now showing items 1-2 of 2
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Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
Rosseel, Erik; Vandervorst, Wilfried; Clarysse, Trudo; Goossens, Jozefien; Moussa, Alain; Lin, Rong; Petersen, Dirch; Nielsen, Peter; Hansen, Otto; Bennett, Nick; Cowern, Nick (2008) -
Review of electrical characterization of ultra-shallow junctions with micro four-point probes
Petersen, Dirch; Hansen, Ole; Hansen, Torben; Boggild, Peter; Lin, Rong; Kjaer, Daniel; Nielsen, Peter F.; Clarysse, Trudo; Vandervorst, Wilfried; Rosseel, Erik; Bennett, Nick; Cowern, Nick (2010)