Authors

Rosseel, Erik; Vandervorst, Wilfried; Clarysse, Trudo; Goossens, Jozefien; Moussa, Alain; Lin, Rong; Petersen, Dirch; Nielsen, Peter; Hansen, Otto; Bennett, Nick; Cowern, Nick

Conference

16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP

Title

Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions

Publication type

Proceedings paper

Embargo date

9999-12-31