Browsing by author "Zverev, A.V."
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Evaluation of thin Ta(N) film integrity deposited on porous glasses
Shamiryan, Denis; Baklanov, Mikhaïl; Yanovitskaya, Z.S.; Zverev, A.V.; Tokei, Zsolt; Iacopi, Francesca; Maex, Karen (2003) -
Simulations of diffusion barrier deposition on porous low-k films
Yanovitskaya, Z.S.; Zverev, A.V.; Shamiryan, Denis; Maex, Karen (2003-11)