Browsing by author "Stirniman, J."
Now showing items 1-1 of 1
-
Optical proximity effects correction at 0.25 mm incorporating process variations in lithography
Tritchkov, Alexander; Rieger, M.; Stirniman, J.; Yen, Anthony; Ronse, Kurt; Vandenberghe, Geert; Van den hove, Luc (1997)