Browsing by author "Falugh, Matthew"

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Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors

Kal, Subhadeep; Oniki, Yusuke; Falugh, Matthew; Pereira, Cheryl; Wang, Qi; Holsteyns, Frank; Smith, Jeffrey; Mosden, Aelan; Kumar, Kaushik; Boemmels, Juergen; Ryckaert, Julien; Biolsi, Peter; Hurd, Trace Q (2019)