Browsing by author "Gelpey, J.C."

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Integrating diffusionless anneals into advanced CMOS technologies

Surdeanu, Radu; Lindsay, Richard; Severi, Simone; Satta, Alessandra; Pawlak, Bartek; Lauwers, Anne; Dachs, C.J.J.; Henson, Kirklen; McCoy, S.; Gelpey, J.C. (2004)