Browsing by author "Van Barel, Greg"
Now showing items 1-7 of 7
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Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Verbist, Agnes; Witvrouw, Ann (2007-03) -
Investigation of intrinsic stress effects in cantilever structures
Hollauer, Christian; Ceric, Hajdn; Van Barel, Greg; Witvrouw, Ann; Selberherr, S. (2007) -
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Van Barel, Greg; Stoffels, Steve; Decoutere, Stefaan; Nguyen, V.; Hentz, S.; Robert, P.; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Claes, Gert; Van Barel, Greg; Van Hoof, Rita; Du Bois, Bert; Gromova, Maria; Verbist, Agnes; Van der Donck, Tom; Decoutere, Stefaan; Celis, Jean-Pierre; Witvrouw, Ann (2008) -
The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model
Van Barel, Greg; De Ceuninck, Ward; Witvrouw, Ann (2008)