Publication:
Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
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1887 since deposited on 2021-10-17
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Acq. date: 2026-10-04
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Statistics
Views
1887 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-10-04
Citations