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Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
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1883 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-07
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Metrics
Views
1883 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-07
Citations