Browsing by author "Henrichsen, Henrik Hartmann"
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Apparent size effects on dopant activation in nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Favia, Paola; Wouters, Lennaert; Petersen, Dirch Hjorth; Hansen, Ole; Henrichsen, Henrik Hartmann; Nielsen, Peter Former; Shiv, Lior; Vandervorst, Wilfried (2021)