Browsing by author "Tedeschi, Len"
Now showing items 1-3 of 3
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Cluster optimization to improve total CD control as an enabler for double patterning
Laidler, David; D'have, Koen; Rosslee, Craig; Tedeschi, Len (2008) -
Cluster optimization to improve total CD control as an enabler for double patterning
Tedeschi, Len; Rosslee, C.; Laidler, David; Leray, Philippe; D'have, Koen (2008) -
Track optimization and control for 32nm node double patterning and beyond
Laidler, David; Rosslee, Craig; D'have, Koen; Leray, Philippe; Tedeschi, Len (2009)