Browsing by author "Santaclara, Jara G"
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Today's scorecard for tomorrow's photoresist: progress and outlook towards High-NA EUV lithography
Santaclara, Jara G; Rispens, Gijsbert; Bekaert, Joost; Thiam, Arame; Maslow, Mark; Hoefnagels, Rik; Zuurbier, Nadia; van Lent, Lidia; Fong Choi, Yin (2021)