Browsing by author "Bencher, Chris"
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Characterization of EUV resists for defectivity at 32nm
Montal, Ofir; Dolev, Ido; Rosenzweig, Moshe; Dotan, Kfir; Meshulach, Doron; Adan, Ofer; Levi, Shimon; Cai, Man-Ping; Bencher, Chris; Ngai, Christopher S.; Jehoul, Christiane; Van Den Heuvel, Dieter; Hendrickx, Eric (2011) -
Mandrel-based patterning: density multiplication techniques for15nm nodes
Bencher, Chris; Dai, Huixiong; Miao, Liyan; Chen, Yongmei; Xu, Ping; Chen, Yijian; Oemardani, Shiany; Sweis, Jason; Wiaux, Vincent; Hermans, Jan; Chang, Li-Wen; Bao, Xinyu; Yi, He; Wong, H.-S. Philippe (2011)