Publication:

Characterization of EUV resists for defectivity at 32nm

Date

2011

Proceedings Paper

Simple item page Full metadata Statistics

Files

22428.pdf 730.53 KB

Author(s)

;

;

Rosenzweig, Moshe

;

;

Meshulach, Doron

;

;

;

;

;

Ngai, Christopher S.

;

Jehoul, Christiane

;

Van Den Heuvel, Dieter

;

Hendrickx, Eric

Metrics

1927 since deposited on 2021-10-19

1last month

Acq. date: 2025-12-12