Characterization of EUV resists for defectivity at 32nm

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Author(s)

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Rosenzweig, Moshe

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Meshulach, Doron

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Ngai, Christopher S.

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Jehoul, Christiane

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Van Den Heuvel, Dieter

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Hendrickx, Eric

Metrics

1923 since deposited on 2021-10-19

Acq. date: 2025-10-27