Browsing by author "Chen, Peng"

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Investigation of plasma hydrogenation and trapping mechanism for layer transfer

Chen, Peng; Chu, Paul K.; Hochbauer, T.; Lee, J-K; Nastasi, M.; Buca, D.; Mantl, S; Loo, Roger; Caymax, Matty; Alford, T.; Mayer, J.W.; David Theodore, N.; Cai, M.; Schmidt, B.; Lau, S.S. (2005)
Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer

Chen, Peng; Chu, Paul K.; Höchbauer, T.; Nastasi, M.; Buca, D.; Mantl, S.; Theodore, N. David; Alford, T.L.; Mayer, J. W.; Loo, Roger; Caymax, Matty; Cai, M.; Lau, S. (2004)