Browsing by author "Sarstedt, Margit"
Now showing items 1-3 of 3
-
Exploring capabilities of electrical linewidth measurement (ELM) techniques
Rangelov, Ventzeslav; Sarstedt, Margit; Somerville, John; Marschner, Thomas; Jonckheere, Rik; Poelaert, Abel (2001) -
Metrology method for the correlation of line edge roughness for different resists before and after etch
Winkelmeier, Stephanie; Sarstedt, Margit; Ercken, Monique; Goethals, Mieke; Ronse, Kurt (2000) -
Metrology method for the correlation of line edge roughness for different resists before and after etch
Winkelmeier, Stephanie; Sarstedt, Margit; Ercken, Monique; Goethals, Mieke; Ronse, Kurt (2001)