Browsing by author "Koo, Il Gyo"

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Active area patterning for CFET - Nanosheet etch

Brissonneau, Vincent; Koo, Il Gyo; Hosseini, Maryam; Batuk, Dmitry; Veloso, Anabela; Mannaert, Geert; Lazzarino, Frederic (2024)