Browsing by author "Wähler, Tobias"
Now showing items 1-3 of 3
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Effective solutions for in-fab EUVL mask cleaning
Wähler, Tobias; Singh, Sherjang; Dietze, Uwe; Jonckheere, Rik; Baudemprez, Bart (2010) -
Preserving printed wafer CD stability in high-frequency EUVL mask cleaning
Wähler, Tobias; Singh, Sherjang; Dietze, Uwe; Jonckheere, Rik; Ronse, Kurt; Baudemprez, Bart (2011) -
Techniques for removal of contamination from EUVL mask without surface damage
Singh, Sherjang; Chen, Ssuwei; Wähler, Tobias; Jonckheere, Rik; Liang, Ted; Chen, Robert J.; Dietze, Uwe (2010)