Browsing by author "Fang, Yu"

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BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure

Fang, Yu; Lesniewska, Alicja; Ciofi, Ivan; Roussel, Philippe; Wu, Chen; Vega Gonzalez, Victor; De Wolf, Ingrid; Croes, Kristof (2024)
Line-to-Line TDDB Modeling: LER Specs for Sub-20-nm Pitch Interconnects

Fang, Yu; Ciofi, Ivan; Roussel, Philippe; Lesniewska, Alicja; Degraeve, Robin; De Wolf, Ingrid; Croes, Kristof (2023)