Browsing by author "Leroy, F"

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Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis

Leroy, F; Tillocher, T; Zhang, Liping; Girard, A.; Cardinaud, C.; Lefaucheux, P.; de Marneffe, Jean-Francois; Dussart, R.; Maekawa, K; Yatsuda, K; Baklanov, Mikhaïl (2015)