Browsing by author "Kobauashi, K."

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Influence of boron implantation dose on the mechanical stress in polycrystalline silicon films

Nakabayashi, M.; Ikegami, M.; Ohyama, Hidenori; Kobauashi, K.; Yoneoka, M.; Simoen, Eddy; Claeys, Cor; Takami, Y.; Sunaga, H.; Takizawa, H. (2000)