Browsing by author "David, Christian"

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EUV resist contrast loss determination using interference lithography

Langner, Andreas; Solak, Harun H.; Auzelyte, Vaida; Ekinci, Yasin; David, Christian; Gobrecht, Jens; Gronheid, Roel; van Setten, Eelco; van Ingen Schenau, Koen; Feenstra, Kees (2009)