Browsing by author "Bogan, Justin"
Now showing items 1-5 of 5
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Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
Zyulkov, Ivan; Madhivala, Viraj; Voronina, Ekaterina; Snelgrove, Matthew; Bogan, Justin; O'Connor, Rob; De Gendt, Stefan; Armini, Silvia (2020) -
Characterisation of electroless deposited cobalt by hard and soft X-ray photoemission spectroscopy
Brady-Boyd, Anita; O'Connor, Rob; Armini, Silvia; Zyulkov, Ivan; Selvaraju, V; Hughes, G; Bogan, Justin (2018) -
Nucleation and adhesion of ultra-thin copper films on amino-terminated self-assembled monolayers
Bogan, Justin; Brady-Boyd, Anita; Armini, Silvia; Lundy, R.; Selvaraju, V.; O'Connor, Robert (2018) -
On the reliability of Cu contacts for the 32nm technology node and beyond
Kauerauf, Thomas; Demuynck, Steven; Butera, Geni; Bogan, Justin; Tokei, Zsolt; Groeseneken, Guido (2009) -
The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
Brady-Boyle, Anita; O'Connor, Robert; Armini, Silvia; Selvaraju, V; Bogan, Justin (2019)