Authors

Zyulkov, Ivan; Madhivala, Viraj; Voronina, Ekaterina; Snelgrove, Matthew; Bogan, Justin; O'Connor, Rob; De Gendt, Stefan; Armini, Silvia

DOI

10.1021/acsami.9b14596

ISSN

1944-8244

Issue

4

Journal

ACS Applied Materials & Interfaces

Volume

12

Title

Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films

Publication type

Journal article