Publication:
Area-selective ALD of Ru on nanometer-scale Cu lines through dimerization of amino-functionalized alkoxy silane passivation films
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2023 since deposited on 2021-10-29
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Acq. date: 2026-05-19
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2023 since deposited on 2021-10-29
1last month
1last week
Acq. date: 2026-05-19
Citations