Browsing by author "Haensel, Leander"
Now showing items 1-3 of 3
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A study of microbump metrology and defectivity at 20m pitch and below for 3D TSV stacking
Miller, Andy; Haensel, Leander; Vandeweyer, Tom; Beyne, Eric; Wiesiollek, Markus; Eisenbach, Heiko; Filzen, Marc; Wen, Youxian; Sood, Sumant (2015) -
Molecular glass resist performance for nano-pattern transfer
El Otell, Ziad; Ringk, Andreas; Kolb, Tristan; Neuber, Christian; Haensel, Leander; de Marneffe, Jean-Francois (2015-03) -
Study of wetting of nanostructures using decoration by etching
Vereecke, Guy; Xu, XiuMei; Kesters, Els; Simms, Ishan; Nafus, Kathleen; Haensel, Leander; Kim, Tae-Gon; Lismont, Mark; Holsteyns, Frank; De Gendt, Stefan (2014)