Molecular glass resist performance for nano-pattern transfer

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Authors
El Otell, Ziad; Ringk, Andreas; Kolb, Tristan; Neuber, Christian; Haensel, Leander; de Marneffe, Jean-Francois
Conference
Advanced Etch Technology for Nanopatterning IV
Title
Molecular glass resist performance for nano-pattern transfer
Publication type
Proceedings paper
Embargo date
9999-12-31
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