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Molecular glass resist performance for nano-pattern transfer
Publication:
Molecular glass resist performance for nano-pattern transfer
Date
2015-03
Proceedings Paper
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30434.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
El Otell, Ziad
;
Ringk, Andreas
;
Kolb, Tristan
;
Neuber, Christian
;
Haensel, Leander
;
de Marneffe, Jean-Francois
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1912
since deposited on 2021-10-22
Acq. date: 2025-10-29
Citations
Metrics
Views
1912
since deposited on 2021-10-22
Acq. date: 2025-10-29
Citations