Publication:

Molecular glass resist performance for nano-pattern transfer

Date

2015-03

Proceedings Paper

Simple item page Full metadata Statistics

Files

30434.pdf 520.48 KB

Author(s)

;

;

;

Neuber, Christian

;

Haensel, Leander

;

de Marneffe, Jean-Francois

Metrics

1913 since deposited on 2021-10-22

Acq. date: 2026-01-06