Browsing by author "Krishnaraj, Chidharth"
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The development of an EUVL pellicle comprising carbon nanomaterials
Vanpaemel, Johannes; Lee, Jae Uk; Krishnaraj, Chidharth; Pollentier, Ivan; Huyghebaert, Cedric; Adelmann, Christoph; Gallagher, Emily (2016)