Browsing by author "Jenq, Shining"
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Post-CMP cleaners for tungsten advanced nodes: 10 nm and 7 nm
Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2017-10) -
Post-CMP cleaners for tungsten at advanced nodes
Lieten, Ruben; White, Daniela; Parson, Thomas; Jenq, Shining; Frye, Don; White, Michael; Teugels, Lieve; Struyf, Herbert (2016)