Browsing by author "Ogura, M."
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High performance n-mos FinFET by damage-free, conformal extension doping
Zschaetzsch, Gerd; Sasaki, Y.; Hayashi, S.; Togo, Mitsuhiro; Chiarella, Thomas; Kambham, Ajay Kumar; Mody, J.; Douhard, Bastien; Horiguchi, Naoto; Mizuno, B.; Ogura, M.; Vandervorst, Wilfried (2011)