Browsing by author "Lee, Yi Chia"
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SiGe vs. Si selective wet etchingfor Si gate-all-around
Komori, Kana; Rip, Jens; Yoshida, Yukifumi; Wostyn, Kurt; Sebaai, Farid; Liu, Wen Dar; Lee, Yi Chia; Sekiguchi, Ryo; Mertens, Hans; Hikavyy, Andriy; Holsteyns, Frank; Horiguchi, Naoto (2018)