Browsing by author "Mencarelli, M."
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Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts
Hikavyy, Andriy; Porret, Clément; Mencarelli, M.; Loo, Roger; Favia, Paola; Ayyad, Mustafa; Briggs, Basoene; Langer, Robert; Horiguchi, Naoto (2021)