Publication:
Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts
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2138 since deposited on 2021-10-31
Acq. date: 2026-09-20
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Statistics
Views
2138 since deposited on 2021-10-31
Acq. date: 2026-09-20
Citations