Publication:
Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts
Date
Loading...
Journal
Abstract
Description
Statistics
Views
2139 since deposited on 2021-10-31
1last month
1last week
Acq. date: 2026-10-13
Citations
Statistics
Views
2139 since deposited on 2021-10-31
1last month
1last week
Acq. date: 2026-10-13
Citations