Authors

Hikavyy, Andriy; Porret, Clément; Mencarelli, M.; Loo, Roger; Favia, Paola; Ayyad, Mustafa; Briggs, Basoene; Langer, Robert; Horiguchi, Naoto

Conference

240th ECS Meeting Symposiusm: Semiconductor Process Integration 12

Title

Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts

Publication type

Proceedings paper