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Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts
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2121 since deposited on 2021-10-31
2last month
Acq. date: 2025-12-15
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Metrics
Views
2121 since deposited on 2021-10-31
2last month
Acq. date: 2025-12-15
Citations