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Cutting-edge epitaxial processes for sub 3 nm technology nodes: application to nanosheet stacks and epitaxial wrap-around contacts
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2122 since deposited on 2021-10-31
1last month
Acq. date: 2026-01-07
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Metrics
Views
2122 since deposited on 2021-10-31
1last month
Acq. date: 2026-01-07
Citations