Browsing by author "Singh, Harpreet"
Now showing items 1-2 of 2
-
Effect of molecular weight on the EUV-printability of main chain scission type polymers
Rathore, Ashish; Pollentier, Ivan; Singh, Harpreet; Fallica, Roberto; De Simone, Danilo; De Gendt, Stefan (2020) -
Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems
Rathore, Ashish; Pollentier, Ivan; Cipriani, Maicol; Singh, Harpreet; De Simone, Danilo; Ingolfsson, Oddur; De Gendt, Stefan (2021)