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Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems
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Authors
Rathore, Ashish
;
Pollentier, Ivan
;
Cipriani, Maicol
;
Singh, Harpreet
;
De Simone, Danilo
;
Ingolfsson, Oddur
;
De Gendt, Stefan
DOI
10.1021/acsapm.1c00018
ISSN
2637-6105
Issue
4
Journal
ACS APPLIED POLYMER MATERIALS
Volume
3
Title
Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems
Publication type
Journal article
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