Browsing by author "Wataru, Shimizu"

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Etching of Co-Pd with significantly reduced sidewall re-deposition

Radisic, Dunja; Nishimura, Eiichi; Kushibiki, Masato; Wataru, Shimizu; Tahara, Shigeru; Xu, Kaidong; Kim, Woosik; Boullart, Werner (2013)