Browsing by author "Högele, W."
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High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node
Neumann, J.T.; Garbowski, T.; Högele, W.; Korb, T.; Halder, Sandip; Leray, Philippe; Garreis, R.; le Maire, M.; Zeidler, D. (2017)