Browsing by author "Conley, W."

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Assessment of light source bandwidth impacts on image contrast enhancement using process window discovery

Alagna, Paolo; Rechtsteiner, G.; Conley, W.; Cross, A.; Sah, K.; Halder, Sandip (2017)
CD control using SiON BARL processing for sub-0.25μm lithography

Zhang, Fenghong; Op de Beeck, Maaike; Schaekers, Marc; Ronse, Kurt; Conley, W.; Gopalan, P.; Gangala, Hareen K; Dusa, M.; Bendik, Joe (1999)