Browsing by author "Baker, Daniel"

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Manufacturable DUV lithography processes for 0.25 μm technology contact and via layers

Baker, Daniel; Op de Beeck, Maaike; Botermans, Harry; Van den hove, Luc (1997)
NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mm and sub-0.25 mm critical levels

Op de Beeck, Maaike; Ronse, Kurt; Ghandehari, Kouros; Jaenen, Patrick; Botermans, Harry; Finders, Jo; Lilygren, John; Baker, Daniel; Vandenberghe, Geert; De Bisschop, Peter; Maenhoudt, Mireille; Van den hove, Luc (1997)