Browsing by author "Toma, Dorel"
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Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials
Heyne, Markus; Zhang, Liping; Liu, Junjun; Ahmad, Iftikhar; Toma, Dorel; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2014)