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Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials
Publication:
Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials
Date
2014
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyne, Markus
;
Zhang, Liping
;
Liu, Junjun
;
Ahmad, Iftikhar
;
Toma, Dorel
;
de Marneffe, Jean-Francois
;
De Gendt, Stefan
;
Baklanov, Mikhaïl
Journal
Journal of Vacuum Science and Technology B
Abstract
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1875
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Acq. date: 2025-10-28
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Metrics
Views
1875
since deposited on 2021-10-22
1
last week
Acq. date: 2025-10-28
Citations