Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials

dc.contributor.author	Heyne, Markus
dc.contributor.author	Zhang, Liping
dc.contributor.author	Liu, Junjun
dc.contributor.author	Ahmad, Iftikhar
dc.contributor.author	Toma, Dorel
dc.contributor.author	de Marneffe, Jean-Francois
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Zhang, Liping
dc.contributor.imecauthor	de Marneffe, Jean-Francois
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-22T01:57:01Z
dc.date.available	2021-10-22T01:57:01Z
dc.date.embargo	9999-12-31
dc.date.issued	2014
dc.identifier.issn	1071-1023
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23930
dc.identifier.url	http://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4896759
dc.source.beginpage	62202
dc.source.issue	6
dc.source.journal	Journal of Vacuum Science and Technology B
dc.source.volume	32
dc.title	Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials
dc.type	Journal article
dspace.entity.type	Publication
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