Browsing by author "Lin, Guanyan"
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Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration
Rincon Delgadillo, Paulina; Gronheid, Roel; Lin, Guanyan; Cao, Yi; Romo Negreira, Ainhoa; Somervell, Mark; Nafus, Kathleen; Nealey, Paul (2013)